Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083888 | Plasma processing apparatus | Tatehito Usui, Tsuyoshi Yoshida, Tsuyoshi Matsumoto, Satoru Muto | 2011-12-27 |
| 8029874 | Plasma processing apparatus and method for venting the same to atmosphere | Hiroyuki Kobayashi, Kenji Maeda, Masaru Izawa | 2011-10-04 |