Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034181 | Plasma processing apparatus | Takumi Tandou, Ken'etsu Yokogawa | 2011-10-11 |
| 8029874 | Plasma processing apparatus and method for venting the same to atmosphere | Hiroyuki Kobayashi, Kenji Maeda, Kenetsu Yokogawa | 2011-10-04 |
| 7918945 | Method for manufacturing surface treated steel material using a chemical conversion treatment liquid | Kunio Goto | 2011-04-05 |
| 7915055 | Manufacturing method of semiconductor device | Masaru Kurihara, Junichi Tanaka | 2011-03-29 |