Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8026482 | Charged particle beam apparatus and control method therefor | Muneyuki Fukuda, Hiromasa Yamanashi, Yasunari Souda, Osamu Nasu | 2011-09-27 |
| 7906761 | Charged particle beam apparatus | Hiroya Ohta, Hiroshi Makino, Ryuichi Funatsu | 2011-03-15 |
| 7880143 | Electron beam apparatus | Hiroya Ohta, Hiroshi Makino, Ryuichi Funatsu | 2011-02-01 |