Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8022365 | Charged particle beam equipments, and charged particle beam microscope | Osamu Kamimura | 2011-09-20 |
| 7906761 | Charged particle beam apparatus | Sayaka Tanimoto, Hiroshi Makino, Ryuichi Funatsu | 2011-03-15 |
| 7880143 | Electron beam apparatus | Sayaka Tanimoto, Hiroshi Makino, Ryuichi Funatsu | 2011-02-01 |
| 7863565 | Electron beam inspection method and electron beam inspection apparatus | Masaki Hasegawa | 2011-01-04 |