Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7953567 | Defect inspection apparatus and defect inspection method | Kei Shimura, Minori Noguchi, Masaaki Ito, Kenji Aiko, Shuichi Chikamatsu +4 more | 2011-05-31 |
| 7876431 | Foreign matter inspection apparatus and foreign matter inspection method | Yoshio Bamba, Shigehisa Nozawa | 2011-01-25 |
| 7869025 | Optical inspection method and optical inspection system | Hideki Soeda | 2011-01-11 |