Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7886685 | Substrate holding apparatus, substrate holding method, and substrate processing apparatus | Masahiko Sekimoto, Seiji Katsuoka, Naoki Dai, Teruyuki Watanabe, Takahiro Ogawa +3 more | 2011-02-15 |