Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981594 | Hardmask composition having antirelective properties and method of patterning material on susbstrate using the same | Jong-seob Kim, Dong Seon Uh, Hwan-Sung Cheon, Chang Il Oh, Min Soo Kim +1 more | 2011-07-19 |
| 7862990 | Polymer having antireflective properties and high carbon content, hardmask composition including the same, and process for forming a patterned material layer | Jong-seob Kim, Dong Seon Uh, Chang Il Oh, Kyung-Hee HYUNG, Min Soo Kim +1 more | 2011-01-04 |