Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981594 | Hardmask composition having antirelective properties and method of patterning material on susbstrate using the same | Kyong Ho Yoon, Jong-seob Kim, Dong Seon Uh, Chang Il Oh, Min Soo Kim +1 more | 2011-07-19 |