Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7862990 | Polymer having antireflective properties and high carbon content, hardmask composition including the same, and process for forming a patterned material layer | Kyong Ho Yoon, Jong-seob Kim, Dong Seon Uh, Chang Il Oh, Min Soo Kim +1 more | 2011-01-04 |