Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8053746 | Irradiation device | Jan Timmer, Holger Goebel, Juergen Heese, Michael Schillo | 2011-11-08 |
| 8054446 | EUV lithography apparatus and method for determining the contamination status of an EUV-reflective optical surface | Dieter Kraus, Dirk Heinrich Ehm | 2011-11-08 |
| 7955767 | Method for examining a wafer with regard to a contamination limit and EUV projection exposure system | Andreas Dorsel | 2011-06-07 |
| 7911598 | Method for cleaning an EUV lithography device, method for measuring the residual gas atmosphere and the contamination and EUV lithography device | Dieter Kraus, Dirk Heinrich Ehm, Thomas Stein, Harald Woelfle | 2011-03-22 |
| 7881828 | Bus module for connecting electrically triggered fluidic valves | — | 2011-02-01 |