Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8054446 | EUV lithography apparatus and method for determining the contamination status of an EUV-reflective optical surface | Dirk Heinrich Ehm, Stefan Schmidt | 2011-11-08 |
| 7911598 | Method for cleaning an EUV lithography device, method for measuring the residual gas atmosphere and the contamination and EUV lithography device | Dirk Heinrich Ehm, Thomas Stein, Harald Woelfle, Stefan Schmidt | 2011-03-22 |
| 7868263 | Percussion hand-held power tool with contactless manual switch located in side handle | Stefan Hammerstingl, Holger Cecchin, Johann Augustin, Uto Plank | 2011-01-11 |