Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7952725 | Surface shape measurement apparatus and exposure apparatus | Takahiro Matsumoto, Satoru Oishi, Hideki Ina | 2011-05-31 |
| 7884935 | Pattern transfer apparatus, imprint apparatus, and pattern transfer method | Nobuhito Suehira, Junichi Seki, Hideki Ina | 2011-02-08 |