Issued Patents 2011
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8047828 | Imprint apparatus, imprint method, and mold for imprint | Nobuhito Suehira, Hideki Ina | 2011-11-01 |
| 8035089 | Scanning probe apparatus | Takao Kusaka, Nobuki Yoshimatsu, Susumu Yasuda | 2011-10-11 |
| 8011916 | Mold, imprint apparatus, and process for producing structure | Nobuhito Suehira | 2011-09-06 |
| 7985061 | Imprint apparatus having attitude control | Nobuhito Suehira, Shingo Okushima | 2011-07-26 |
| 7981304 | Process for producing a chip using a mold | Atsunori Terasaki, Nobuhito Suehira, Hideki Ina, Shingo Okushima | 2011-07-19 |
| 7960090 | Pattern forming method, pattern formed thereby, mold, processing apparatus, and processing method | Atsunori Terasaki | 2011-06-14 |
| 7927089 | Mold, apparatus including mold, pattern transfer apparatus, and pattern forming method | Masao Majima, Nobuhito Suehira | 2011-04-19 |
| 7884935 | Pattern transfer apparatus, imprint apparatus, and pattern transfer method | Nobuhito Suehira, Hideki Ina, Koichi Sentoku | 2011-02-08 |
| 7862761 | Pattern forming method and pattern forming apparatus | Shingo Okushima | 2011-01-04 |