Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8047828 | Imprint apparatus, imprint method, and mold for imprint | Nobuhito Suehira, Junichi Seki | 2011-11-01 |
| 7981304 | Process for producing a chip using a mold | Atsunori Terasaki, Junichi Seki, Nobuhito Suehira, Shingo Okushima | 2011-07-19 |
| 7952725 | Surface shape measurement apparatus and exposure apparatus | Koichi Sentoku, Takahiro Matsumoto, Satoru Oishi | 2011-05-31 |
| 7924426 | Information processing apparatus for interference signal processing | Tomoyuki Miyashita, Takahiro Matsumoto | 2011-04-12 |
| 7916271 | Apparatus and method for specifying correlation, exposure apparatus, and device manufacturing method | Satoru Oishi | 2011-03-29 |
| 7884935 | Pattern transfer apparatus, imprint apparatus, and pattern transfer method | Nobuhito Suehira, Junichi Seki, Koichi Sentoku | 2011-02-08 |