Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7983472 | Position detecting method | — | 2011-07-19 |
| 7952725 | Surface shape measurement apparatus and exposure apparatus | Koichi Sentoku, Takahiro Matsumoto, Hideki Ina | 2011-05-31 |
| 7916271 | Apparatus and method for specifying correlation, exposure apparatus, and device manufacturing method | Hideki Ina | 2011-03-29 |
| 7865328 | Position detecting method and apparatus | Takehiko Suzuki | 2011-01-04 |