Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7961293 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Paul Graeupner +1 more | 2011-06-14 |
| 7889321 | Illumination system for illuminating a patterning device and method for manufacturing an illumination system | Hendricus Johannes Maria Meijer | 2011-02-15 |