Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7960074 | Method of generating a photolithography patterning device, computer program, patterning device, method of determining the position of a target image on or proximate a substrate, measurement device, and lithographic apparatus | Uwe Mickan | 2011-06-14 |
| 7889321 | Illumination system for illuminating a patterning device and method for manufacturing an illumination system | Jan Bernard Plechelmus Van Schoot | 2011-02-15 |