Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8086348 | Method of transferring a substrate, transfer system and lithographic projection apparatus | Jozef Augustinus Maria Alberti, Frans Erik Groensmit, Rene Theodorus Petrus Compen | 2011-12-27 |
| 8064045 | Method of transferring a substrate, transfer system and lithographic projection apparatus | Jozef Augustinus Maria Alberti, Frans Erik Groensmit, Rene Theodorus Petrus Compen | 2011-11-22 |
| 7936444 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more | 2011-05-03 |