Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8086348 | Method of transferring a substrate, transfer system and lithographic projection apparatus | Jozef Augustinus Maria Alberti, Gerardus Petrus Matthijs Van Nunen, Frans Erik Groensmit | 2011-12-27 |
| 8064045 | Method of transferring a substrate, transfer system and lithographic projection apparatus | Jozef Augustinus Maria Alberti, Gerardus Petrus Matthijs Van Nunen, Frans Erik Groensmit | 2011-11-22 |
| 7978308 | Lithographic apparatus and device manufacturing method | Oleg Viacheslavovich Voznyi, Martijn Houben, Majid El Bouchaibi, Franciscus Johannes Maria Boekholt, Remko Wakker | 2011-07-12 |