Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7985515 | Method and apparatus for performing model-based layout conversion for use with dipole illumination | Kurt E. Wampler, Markus Franciscus Antonius Eurlings, Jang Fung Chen, Noel Corcoran | 2011-07-26 |
| 7981576 | Method and apparatus for performing dark field double dipole lithography (DDL) | Sangbong Park, Douglas Van Den Broeke, Jang Fung Chen | 2011-07-19 |
| 7892703 | CPL mask and a method and program product for generating the same | Jang Fung Chen, Douglas Van Den Broeke, Jung Chul Park, Thomas Laidig | 2011-02-22 |