Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039180 | Scattering bar OPC application method for sub-half wavelength lithography patterning | Kurt E. Wampler, Douglas Van Den Broeke, Jang Fung Chen | 2011-10-18 |
| 7892703 | CPL mask and a method and program product for generating the same | Jang Fung Chen, Duan-Fu Stephen Hsu, Douglas Van Den Broeke, Jung Chul Park | 2011-02-22 |
| 7892707 | Scattering bar OPC application method for sub-half wavelength lithography patterning | Kurt E. Wampler, Douglas Van Den Broeke, Jang Fung Chen | 2011-02-22 |