Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039180 | Scattering bar OPC application method for sub-half wavelength lithography patterning | Thomas Laidig, Douglas Van Den Broeke, Jang Fung Chen | 2011-10-18 |
| 7998355 | CPL mask and a method and program product for generating the same | Douglas Van Den Broeke, Jang Fung Chen | 2011-08-16 |
| 7985515 | Method and apparatus for performing model-based layout conversion for use with dipole illumination | Duan-Fu Stephen Hsu, Markus Franciscus Antonius Eurlings, Jang Fung Chen, Noel Corcoran | 2011-07-26 |
| 7892707 | Scattering bar OPC application method for sub-half wavelength lithography patterning | Thomas Laidig, Douglas Van Den Broeke, Jang Fung Chen | 2011-02-22 |