Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039397 | Using optical metrology for within wafer feed forward process control | Jeffrey Drue David, Harry Q. Lee, Dominic J. Benvegnu, Zhize Zhu, Wen-Chiang Tu | 2011-10-18 |
| 8014004 | Determining physical property of substrate | Abraham Ravid, Jeffrey Drue David, Jun Qian, Ingemar Carlsson, Dominic J. Benvegnu +2 more | 2011-09-06 |
| 7999540 | Eddy current apparatus and method for in-situ profile measurement | G. Laurie Miller, Manoocher Birang | 2011-08-16 |
| 7952708 | High throughput measurement system | Abraham Ravid, Dominic J. Benvegnu, Jeffrey Drue David, Jun Qian, Sidney P. Huey +3 more | 2011-05-31 |
| 7942724 | Polishing pad with window having multiple portions | Dominic J. Benvegnu, Jimin Zhang | 2011-05-17 |
| 7927182 | Polishing system with in-line and in-situ metrology | Bret W. Adams, Sanjay Rajaram, David A. Chan, Manoocher Birang | 2011-04-19 |