Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7927182 | Polishing system with in-line and in-situ metrology | Boguslaw A. Swedek, Sanjay Rajaram, David A. Chan, Manoocher Birang | 2011-04-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7927182 | Polishing system with in-line and in-situ metrology | Boguslaw A. Swedek, Sanjay Rajaram, David A. Chan, Manoocher Birang | 2011-04-19 |