Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7999540 | Eddy current apparatus and method for in-situ profile measurement | G. Laurie Miller, Boguslaw A. Swedek | 2011-08-16 |
| 7971489 | Carbon nanotube-based load cells | Victor L. Pushparaj, Omkaram Nalamasu | 2011-07-05 |
| 7947131 | Copper deposition chamber having integrated bevel clean with edge bevel removal detection | Chen-An Chen, Anh N. Nguyen | 2011-05-24 |
| 7935240 | Electroplating apparatus and method based on an array of anodes | Saravjeet Singh, Nicolay Kovarsky, Aron Rosenfeld | 2011-05-03 |
| 7927182 | Polishing system with in-line and in-situ metrology | Boguslaw A. Swedek, Bret W. Adams, Sanjay Rajaram, David A. Chan | 2011-04-19 |