Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058156 | Plasma immersion ion implantation reactor having multiple ion shower grids | Hiroji Hanawa, Tsutomu Tanaka, Kenneth S. Collins, Kartik Ramaswamy, Andrew Nguyen | 2011-11-15 |
| 7879683 | Methods and apparatus of creating airgap in dielectric layers for the reduction of RC delay | Alexandros T. Demos, Kang Sub Yim, Mehul Naik, Zhenjiang Cui, Mihaela Balseanu +2 more | 2011-02-01 |