Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7998536 | Silicon precursors to make ultra low-K films of K<2.2 with high mechanical properties by plasma enhanced chemical vapor deposition | Alexandros T. Demos | 2011-08-16 |
| 7989033 | Silicon precursors to make ultra low-K films with high mechanical properties by plasma enhanced chemical vapor deposition | Alexandros T. Demos | 2011-08-02 |
| 7879683 | Methods and apparatus of creating airgap in dielectric layers for the reduction of RC delay | Amir Al-Bayati, Alexandros T. Demos, Mehul Naik, Zhenjiang Cui, Mihaela Balseanu +2 more | 2011-02-01 |