Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058183 | Restoring low dielectric constant film properties | Zhenjiang Cui, May Yu, Mehul Naik | 2011-11-15 |
| 7998536 | Silicon precursors to make ultra low-K films of K<2.2 with high mechanical properties by plasma enhanced chemical vapor deposition | Kang Sub Yim | 2011-08-16 |
| 7989033 | Silicon precursors to make ultra low-K films with high mechanical properties by plasma enhanced chemical vapor deposition | Kang Sub Yim | 2011-08-02 |
| 7947611 | Method of improving initiation layer for low-k dielectric film by digital liquid flow meter | Dustin W. Ho, Juan Carlos Rocha-Alvarez, Kelvin Chan, Nagarajan Rajagopalan, Visweswaren Sivaramakrishnan | 2011-05-24 |
| 7879683 | Methods and apparatus of creating airgap in dielectric layers for the reduction of RC delay | Amir Al-Bayati, Kang Sub Yim, Mehul Naik, Zhenjiang Cui, Mihaela Balseanu +2 more | 2011-02-01 |