Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7964858 | Ultraviolet reflector with coolant gas holes and method | Yao-Hung YANG, Tuan Nguyen, Sanjeev Baluja, Andrzej Kaszuba, Juan Carlos Rocha +1 more | 2011-06-21 |
| 7947611 | Method of improving initiation layer for low-k dielectric film by digital liquid flow meter | Juan Carlos Rocha-Alvarez, Alexandros T. Demos, Kelvin Chan, Nagarajan Rajagopalan, Visweswaren Sivaramakrishnan | 2011-05-24 |