Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062982 | High yield plasma etch process for interlayer dielectrics | Daniel Fischer, Matthias Schaller, Matthias Lehr | 2011-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062982 | High yield plasma etch process for interlayer dielectrics | Daniel Fischer, Matthias Schaller, Matthias Lehr | 2011-11-22 |