Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7985449 | Methods for depositing metal films onto diffusion barrier layers by CVD or ALD processes | Diwakar Garg, Hansong Cheng, Eduardo Machado, Pablo Ordejon | 2011-07-26 |
| 7943195 | Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants | Raymond Nicholas Vrtis, Mark Leonard O'Neill, Jean Louise Vincent, Aaron Scott Lukas, Manchao Xiao | 2011-05-17 |
| 7919409 | Materials for adhesion enhancement of copper film on diffusion barriers | Hansong Cheng, Xinjian Lei, Daniel P. Spence, David A. Roberts, Bo Han +2 more | 2011-04-05 |