Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7910765 | Composition and method for low temperature deposition of silicon-containing films such as films including silicon, silicon nitride, silicon dioxide and/or silicon-oxynitride | Chongying Xu, Ravi Laxman, Thomas H. Baum, Bryan C. Hendrix, Jeffrey F. Roeder | 2011-03-22 |
| 7887883 | Composition and method for low temperature deposition of silicon-containing films | Chongying Xu, Thomas H. Baum, Bryan C. Hendrix, Jeffrey F. Roeder | 2011-02-15 |
| 7863203 | Monosilane or disilane derivatives and method for low temperature deposition of silicon-containing films using the same | Chongying Xu, Thomas H. Baum | 2011-01-04 |