Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8053375 | Super-dry reagent compositions for formation of ultra low k films | Chongying Xu, Thomas H. Baum, Steven M. Bilodeau, Scott L. Battle, William Hunks +1 more | 2011-11-08 |
| 8034407 | Chemical vapor deposition of high conductivity, adherent thin films of ruthenium | Bryan C. Hendrix, James Welch, Steven M. Bilodeau, Chongying Xu, Thomas H. Baum | 2011-10-11 |
| 8008117 | Antimony and germanium complexes useful for CVD/ALD of metal thin films | William Hunks, Tianniu Chen, Chongying Xu, Thomas H. Baum, Melissa A. Petruska +4 more | 2011-08-30 |
| 7964746 | Copper precursors for CVD/ALD/digital CVD of copper metal films | Tianniu Chen, Chongying Xu, Thomas H. Baum, Bryan C. Hendrix, Juan E. Dominguez +2 more | 2011-06-21 |
| 7910765 | Composition and method for low temperature deposition of silicon-containing films such as films including silicon, silicon nitride, silicon dioxide and/or silicon-oxynitride | Ziyun Wang, Chongying Xu, Ravi Laxman, Thomas H. Baum, Bryan C. Hendrix | 2011-03-22 |
| 7887883 | Composition and method for low temperature deposition of silicon-containing films | Ziyun Wang, Chongying Xu, Thomas H. Baum, Bryan C. Hendrix | 2011-02-15 |
| 7862857 | Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material | Peter C. Van Buskirk, Steven M. Bilodeau, Michael W. Russell, Stephen T. Johnston, Daniel J. Vestyck +1 more | 2011-01-04 |