Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6894298 | Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas discharge | Imtiaz Ahmad, Juergen Kleinschmidt | 2005-05-17 |
| 6882704 | Radiation source for generating extreme ultraviolet radiation | Kai Gaebel, Uwe Stamm | 2005-04-19 |
| 6855932 | Detector arrangement for energy measurement of pulsed x-ray radiation | Juergen Kleinschmidt | 2005-02-15 |