Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6965624 | Laser gas replenishment method | Hans-Stephan Albrecht, Klaus Vogler, Juergen Kleinschmidt, Thomas Schroeder, Igor Bragin +3 more | 2005-11-15 |
| 6894285 | Arrangement for monitoring the energy radiated by an EUV radiation source | Juergen Kleinschmidt | 2005-05-17 |
| 6882704 | Radiation source for generating extreme ultraviolet radiation | Guido Schriever, Kai Gaebel | 2005-04-19 |
| 6862307 | Electrical excitation circuit for a pulsed gas laser | Rustem Osmanow, Andreas Targsdorg | 2005-03-01 |