Issued Patents 2005
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6965624 | Laser gas replenishment method | Hans-Stephan Albrecht, Klaus Vogler, Thomas Schroeder, Igor Bragin, Vadim Berger +3 more | 2005-11-15 |
| 6946669 | Arrangement for the generation of EUV radiation with high repetition rates | — | 2005-09-20 |
| 6914920 | Method for energy stabilization of gas discharged pumped in selected impulse following driven beam sources | — | 2005-07-05 |
| 6894298 | Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas discharge | Imtiaz Ahmad, Guido Schriever | 2005-05-17 |
| 6894285 | Arrangement for monitoring the energy radiated by an EUV radiation source | Uwe Stamm | 2005-05-17 |
| 6865212 | Method for energy control of pulsed driven, gas discharged-coupled beam sources | — | 2005-03-08 |
| 6855932 | Detector arrangement for energy measurement of pulsed x-ray radiation | Guido Schriever | 2005-02-15 |
| 6856638 | Resonator arrangement for bandwidth control | Konstantin Aab, Peter Lokai, Matthias Ulrich | 2005-02-15 |