Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6973164 | Laser-produced plasma EUV light source with pre-pulse enhancement | Jeffrey S. Hartlove, Mark E. Michaelian, Samuel Talmadge, Steven W. Fornaca, Armando Martos | 2005-12-06 |
| 6933515 | Laser-produced plasma EUV light source with isolated plasma | Jeffrey S. Hartlove, Mark E. Michaelian, Steven W. Fornaca, Stuart McNaught, Fernando Martos +1 more | 2005-08-23 |
| 6912267 | Erosion reduction for EUV laser produced plasma target sources | Rocco A. Orsini, Michael B. Petach, Mark E. Michaelian, Roy D. McGregor, Steven W. Fornaca | 2005-06-28 |
| 6855943 | Droplet target delivery method for high pulse-rate laser-plasma extreme ultraviolet light source | — | 2005-02-15 |