Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6912267 | Erosion reduction for EUV laser produced plasma target sources | Rocco A. Orsini, Mark E. Michaelian, Henry Shields, Roy D. McGregor, Steven W. Fornaca | 2005-06-28 |
| 6864497 | Droplet and filament target stabilizer for EUV source nozzles | Rocco A. Orsini, Roy D. McGregor | 2005-03-08 |