Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6973164 | Laser-produced plasma EUV light source with pre-pulse enhancement | Mark E. Michaelian, Henry Shields, Samuel Talmadge, Steven W. Fornaca, Armando Martos | 2005-12-06 |
| 6933515 | Laser-produced plasma EUV light source with isolated plasma | Mark E. Michaelian, Henry Shields, Steven W. Fornaca, Stuart McNaught, Fernando Martos +1 more | 2005-08-23 |