Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6943110 | Wafer processing apparatus and methods for depositing cobalt silicide | David Lee, Kuang-Chih Wang | 2005-09-13 |
| 6917109 | Air gap structure and formation method for reducing undesired capacitive coupling between interconnects in an integrated circuit device | David Lee, Kuang-Chih Wang, Ming-Sheng Yang | 2005-07-12 |
| 6878627 | Semiconductor device with cobalt silicide contacts and method of making the same | David Lee, Kuang-Chih Wang | 2005-04-12 |
| 6858487 | Method of manufacturing a semiconductor device | Ming-Sheng Yang | 2005-02-22 |
| 6838357 | Chemical mechanical polishing for forming a shallow trench isolation structure | Coming Chen, Juan-Yuan Wu | 2005-01-04 |