Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6943110 | Wafer processing apparatus and methods for depositing cobalt silicide | Water Lur, David Lee | 2005-09-13 |
| 6917109 | Air gap structure and formation method for reducing undesired capacitive coupling between interconnects in an integrated circuit device | Water Lur, David Lee, Ming-Sheng Yang | 2005-07-12 |
| 6878627 | Semiconductor device with cobalt silicide contacts and method of making the same | Water Lur, David Lee | 2005-04-12 |