Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949478 | Oxide film forming method | Tadahiro Ohmi, Takashi Imaoka, Hisayuki Shimada, Nobuhiro Konishi, Mizuho Morita +5 more | 2005-09-27 |
| 6927112 | Radical processing of a sub-nanometer insulation film | Masanobu Igeta, Hiroshi Shinriki, Tsuyoshi Takahashi | 2005-08-09 |
| 6866890 | Method of forming a dielectric film | Hideki Kiryu, Tsuyoshi Takahashi, Hiroshi Shinriki | 2005-03-15 |