Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953731 | Fabrication process of a semiconductor device | Kazumi Kubo | 2005-10-11 |
| 6927112 | Radical processing of a sub-nanometer insulation film | Masanobu Igeta, Shintaro Aoyama, Tsuyoshi Takahashi | 2005-08-09 |
| 6866882 | Method of forming a thin film | Kenji Matsumoto | 2005-03-15 |
| 6866890 | Method of forming a dielectric film | Hideki Kiryu, Shintaro Aoyama, Tsuyoshi Takahashi | 2005-03-15 |