MI

Masanobu Igeta

TL Tokyo Electron Limited: 1 patents #112 of 433Top 30%
📍 Nirasaki, NY: #1 of 4 inventorsTop 25%
Overall (2005): #146,195 of 245,428Top 60%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6927112 Radical processing of a sub-nanometer insulation film Shintaro Aoyama, Hiroshi Shinriki, Tsuyoshi Takahashi 2005-08-09