Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975018 | Semiconductor device | Tadahiro Ohmi, Shigetoshi Sugawa, Yasuyukil Shirai | 2005-12-13 |
| 6929830 | Plasma treatment method and method of manufacturing optical parts using the same | Goushu Tei, Nobuyoshi Tanaka, Tadahiro Ohmi | 2005-08-16 |
| 6896490 | Vacuum apparatus | Tadahiro Ohmi | 2005-05-24 |
| 6893970 | Plasma processing method | Norio Kanetsuki, Tatsushi Yamamoto, Tadahiro Ohmi | 2005-05-17 |
| 6866747 | Plasma processing apparatus | Takamitsu Tadera, Tatsushi Yamamoto, Tadahiro Ohmi | 2005-03-15 |
| 6847672 | Laser gas supply path structure in an exposure apparatus | Tadahiro Ohmi, Hiroshi Osawa, Nobuyoshi Tanaka, Kazuhide Ino, Toshikuni Shinohara +1 more | 2005-01-25 |