Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958094 | Single crystal cutting method | Tadahiro Ohmi, Shigetoshi Sugawa, Tatsuo Ito, Koichi Kanaya | 2005-10-25 |
| 6847672 | Laser gas supply path structure in an exposure apparatus | Tadahiro Ohmi, Hiroshi Osawa, Nobuyoshi Tanaka, Kazuhide Ino, Yasuyuki Shirai +1 more | 2005-01-25 |