Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6893970 | Plasma processing method | Norio Kanetsuki, Masaki Hirayama, Tadahiro Ohmi | 2005-05-17 |
| 6866747 | Plasma processing apparatus | Takamitsu Tadera, Masaki Hirayama, Tadahiro Ohmi | 2005-03-15 |