Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6919273 | Method for forming TiSiN film, diffusion preventive film comprising TiSiN film, semiconductor device and its production method, and apparatus for forming TiSiN film | Hayashi Otsuki, Kimihiro Matsuse | 2005-07-19 |
| 6841203 | Method of forming titanium film by CVD | Hayashi Otsuki | 2005-01-11 |