Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936102 | SiC material, semiconductor processing equipment and method of preparing SiC material therefor | Satoru Nogami | 2005-08-30 |
| 6919273 | Method for forming TiSiN film, diffusion preventive film comprising TiSiN film, semiconductor device and its production method, and apparatus for forming TiSiN film | Kunihiro Tada, Kimihiro Matsuse | 2005-07-19 |
| 6861356 | Method of forming a barrier film and method of forming wiring structure and electrodes of semiconductor device having a barrier film | Kimihiro Matsuse | 2005-03-01 |
| 6841203 | Method of forming titanium film by CVD | Kunihiro Tada | 2005-01-11 |
| 6838376 | Method of forming semiconductor wiring structures | Kimihiro Matsuse | 2005-01-04 |