Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6919273 | Method for forming TiSiN film, diffusion preventive film comprising TiSiN film, semiconductor device and its production method, and apparatus for forming TiSiN film | Hayashi Otsuki, Kunihiro Tada | 2005-07-19 |
| 6861356 | Method of forming a barrier film and method of forming wiring structure and electrodes of semiconductor device having a barrier film | Hayashi Otsuki | 2005-03-01 |
| 6838376 | Method of forming semiconductor wiring structures | Hayashi Otsuki | 2005-01-04 |